Undergrad Research Project - High-G Accelerometer

Spring 2018

Ranganath Selagamsetty
Tamal Mukherjee
Project description

The overall goal is to design, fabricate and characterize a monolithic high-G capacitive single-axis accelerometer targeting over 150 dB dynamic range. For survivability in high shock environments, the accelerometer is designed to be extremely stiff. To prevent this stiffness from degrading accelerometer sensitivity when using a capacitive readout mechanism, multiple accelerometer cells are arrayed in parallel. This parallel capacitive readout allows for sensing low-G acceleration to enable accurate accelerometer-based navigation.

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